Chemisorption of hydrocarbon species on transition metals during diamond chemical vapor deposition
نویسندگان
چکیده
This paper presents a brief discussion of the phenomena associated with chemisorption of hydrocarbon species on transition metals during diamond chemical vapor deposition. The concepts relevant to the surface energetics are summarized, and the methods developed for the calculation of surface chemisorption energies are reviewed. Chemisorption energies of methyl radicals on transition metals are estimated on the basis of published results. The estimated chemisorption energies of CH3 on Ni, Co, Fe, W (Mo), Ta and Ti are 36, 34, 43, 64, 85 and 85 kcal/mole, respectively. The results provide the necessary input parameters for studies of diamond nucleation kinetics. Submitted to Chemical Physics Letters on October 18, 1995
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